Author:
Kovarsky A. P.,Kretser Yu. L.,Kudriavtsev Yu A.,Stroganov D. N.,Yagovkina M. A.,Beierlein Tilman,Strite S.
Abstract
We demonstrate that our secondary mass ion spectroscopy (SIMS) method for the determination of the mole fraction in solid InxGa1-xN solutions is accurate and reproduceable without need of reference samples. The method is based on measuring relative current values of CsM+ (M=Ga, In) secondary ions. The claim of reliable SIMS determination without reference samples was confirmed by four independent analytical methods on the same samples with a relative error in the InN mole fraction determination below 15%.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Cited by
3 articles.
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