Excimer Laser Induced Patterning of PSZT and PLZT Flms

Abstract

AbstractThe patterning of strontium-doped lead zirconium titanate (PSZT) and lanthanum-doped lead zirconium titanate (PLZT) films has been examined using excimer laser radiation. Both types of film were deposited by rf magnetron sputtering using in-situ heating and a controlled cooling rate in order to obtain the perovskite-oriented phase. The depth of laser ablation in both PSZT and PLZT films showed a logarithmic dependence on fluence. The threshold fluence required to initiate ablation was ∼1.25 mJ/cm2 for PLZT and ∼1.87 mJ/cm2 for PSZT films. The ablation rate of PLZT films was slightly higher than that of PSZT films over the range of fluence (10-150 J/cm2) and increased linearly with number of pulses. The higher ablation rate of PLZT films has been attributed to the finer grainsize (160-200 nm) than in the PSZT films (1.0-1.2 µm).