Low Temperature Poly-Si Layers Deposited by Hot Wire CVD Yielding a Mobility of 4.0 cm2V−1s−1 in Top Gate Thin Film Transistors-Reference-Cited by-同舟云学术

Low Temperature Poly-Si Layers Deposited by Hot Wire CVD Yielding a Mobility of 4.0 cm2V−1s−1 in Top Gate Thin Film Transistors

Published:2000 Issue: Volume:609 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Schropp R.E.I.,Rath J.K.,Stannowski B.,Werf C.H.M. Van Der,Chen Y.,Wagner S.

Abstract

ABSTRACTDirect deposition of polycrystalline silicon (poly-Si) thin films by the Hot Wire CVD method has been used for the first time for the fabrication of poly-Si top gate Thin Film Transistors (TFTs). The TFTs have a high electron mobility in saturation of up to 4 cm2V−1s−1 as well as a remarkably large ON/OFF ratio of up to 6 × 105.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference15 articles.

1. Deposition of amorphous silicon films by hot-wire chemical vapor deposition

2. Hot-Wire CVD Poly-Silicon Films for Thin Film Devices

3. Novel profiled thin-film polycrystalline silicon solar cells on stainless steel substrates

4. Stability of Amorphous Silicon Thin Film Transistors for Analog Circuit Applications

5. Thin-Film Transistors based on Hot-Wire Amorphous Silicon on Silicon Nitride

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