In-Situ Reflectance Measurements of Measurements of During Ion Implantation

Abstract

AbstractDamage introduced during ion implantation of semiconductor materials coalesce at a certain critical dose, for a particular energy and ion species. After this threshold dose rapid changes occur in the reflectance. This may be used for studying the amorphization process, or it may be applied as a non--destructive dosimeter and uniformity tool.An automated reflectometer was developed for studying reflectance during ion implantation of semiconductors with various ion species. Results on argon and phosphorous implants into silicon at energies ranging from 50 to 240 keV are presented.