Author:
Nagai Satoshi,Tanaka Hideaki,Fujimura Norifumi,Ito Taichiro
Abstract
ABSTRACTThe Orientation control of (Ca,Sr)CuO2 film has been investigated under various sputtering conditions from the view point of controlling the “self-texture” and epitaxy. The films with (001), (110) and (101) orientations were able to be obtained by changing partial gas pressure during sputtering. These orientations were observed on glass and MgO(100) single crystal substrates. The cohesive energy between the film and the MgO single crystal substrate was calculated to evaluate the change in orientation on glass and MgO substrates.
Publisher
Springer Science and Business Media LLC