Characteristics of ZnSe Layers Grown on Zn-Stabilized and Se-Stabilized GaAs Substrates

Abstract

ABSTRACTOrganometallic vapor phase epitaxial (OM VPE) growth of ZnSe on GaAs was carried out using dimethylzinc (DMZn) and dimethylselenium (DMSe) as source precursors. The growth of ZnSe can be initiated either by introducing DMZn first (Zn stabilized) or DMSe first (Se stabilized).A systematic study of this growth initiation step on the properties of ZnSe epilayers was carried out using Photoluminescence (PL) and Double Crystal X-Ray Diffraction (DCD) in order to optimize the ZnSe-GaAs interface. PL and DCD data show a considerable difference in lattice relaxation mechanism between Zn and Se stabilized layers. Se stabilized layers are also seen to be considerably tilted with respect to the substrate. PL properties of Se stabilized layers exhibit strong near band edge emission (NBE) and weak deep level emission such as Y0, compared to layers grown by Zn stabilization.