Tantalum and Tantalum Silicide High Temperature Rectifying Contacts on Type MB Natural Diamond

Abstract

ABSTRACTTantalum and tantalum suicide contacts were investigated as high temperature rectifying contacts on type MB natural diamond. Tantalum and silicon were co-sputtered using DC and RF planar magnetrons, respectively. Current-voltage measurements of tantalum suicide subjected to various anneals and of pure tantalum contacts were recorded at 50°C intervals up to 400°C which was the desired operating temperature of the rectifying contact. Tantalum contacts to diamond maintained good rectification up to 300°C whereas amorphous tantalum suicide operated well up to 400°C.