Nitrogen Effects on Crystallization Kinetics of Amorphous TiOxNy Thin Films

Abstract

The crystallization behavior of amorphous TiOxNy (x ≫ y) thin films was investigated by in situ transmission electron microscopy. The Johnson–Mehl–Avrami–Kozolog (JMAK) theory was used to determine the Avrami exponent, activation energy, and the phase velocity pre-exponent. Addition of nitrogen inhibited diffusion, increasing the nucleation temperature, while decreasing the growth activation energy. Kinetic variables extracted from individual crystallites were compared to JMAK analysis of the fraction transformed, and a change of 6% in the activation energy led to agreement between the methods. From diffraction patterns and index of refraction the crystallized phase was found to be predominantly anatase.