Thin Film Synthesis Using Miniature Pulsed Metal Vapor Vacuum arc Plasma Guns
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Engineering
Reference29 articles.
1. Multiply stripped ion generation in the metal vapor vacuum arc
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4. Synthesis of unattainable ion implantation profiles – ‘Pseudo-implantation';Ion Beam Modification of Materials;1996
5. Plasma Synthesis of Rare Earth Doped Integrated Optical Waveguides;MRS Proceedings;1995
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