Charge and Current Transient Measurements on N-Type Hydrogenated Amorphous Silicon in the Relaxation Regime

Author:

Paschen Uwe W.,Kwon Daewon,David Cohen J.

Abstract

ABSTRACTJunction capacitance measurements were employed to study the thermal emission of electrons after application of a voltage filling pulse on a 80 Vppm PH3 doped a-Si:H sample on p+ c-Si substrate. We show that these data can be explained in terms of the relaxation Model. In addition, the time dependence of the charge flow into the depletion region during the filling pulse is investigated by current transient Measurements. Finally, we present charge transient data for a 9 Vppm a-Si:H sample on n+ c-Si substrate and compare the results to those obtained on samples on p-type substrates.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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