Characterization of Dielectric Layers on Hydrogen Passivated Si Surfaces

Abstract

ABSTRACTWe have Investigated the layer formed on Si surfaces passivated by a Kaufman Ion source using mixtures of hydrogen and hydrocarbons. Chemical, optical, and electronic techniques were employed to characterize this layer and Its effect on passivation of defects in the Si. The evidence Indicates that the layer Is a dielectric and probably has the formula Six C(1-x) (H). It does not appear to Impede the passivation of polycrystalline Si, but it does affect the reflectivity of the Si material, and also the barrier height In Schottky junctions. We suggest that a similar layer may be formed during other hydrogen/hydrocarbon plasma treatments of SI.