A Simple Method for Determination of the Elastic Modulus of Thin Films on a Substrate

Abstract

ABSTRACTHigh precision force displacement indenting instruments are now widely used for the determination of the mechanical properties of materials. However, for thin films attached to a substrate, the basis of any analysis of such high precision data is still limited. In this study the force displacement data has been generated using spherically tipped indenters of radii from 5 to 150 μm loaded onto a 2.74 μm thick TiN film on a silicon substrate as well as onto the substrate directly. Data have been generated using two loading procedures, continuous and load partial-unloading, almost entirely within the elastic contact regime. The results are analysed to determine the modulus of the TiN film.