a-Si and μc-Si Grown from SiF4 with High H2 Dilution in a DC Glow Discharge

Abstract

ABSTRACTa-Si and μc-Si were grown from SiF4 with H2 dilution in a DC glow discharge. The crystallinity of films deposited over a range of substrate temperatures and SiF4/H2 flow ratios was studied by Raman spectroscopy and the boundary between microcrystalline and amorphous Si was determined. We find that μc-Si can be grown from SiF4 with less H2 dilution than from SiH4. In the SiF4/H2 system, the etching by of F atoms appears responsible for μc-growth; H atoms play an important role in balancing growth and etching reactions.