Author:
Persans P. D.,Ruppert A. F.,Abeles B.,Hughes G.,Liang K. S.
Abstract
ABSTRACTWe discuss high-resolution x-ray diffraction measurements on a-Si:H/a-Ge:H periodic amorphous multilayers. Analysis of the data using the dynamical theory yields information on layer thicknesses and densities, interface and surface roughness, and structural defects such as layer thickness fluctuations.
Publisher
Springer Science and Business Media LLC
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