High-Quality A-Si Films Prepared by the Direct Photo-Cvd Method

Abstract

ABSTRACTA high-efficiency integrated-type a-Si solar cell submodule with a size of 10cm × 10cm has been fabricated and a total area efficiency of 9.6% is obtained by using a high-quality p-layer doped with B(CH3)3 We have developed an advanced direct photo-CVD method. High-quallt” a-SI films with low tail characteristic energy and low light-induced degradation is prepared by this method. We have also studied the role of Si-H2 bonds on the light-induced effect. The result implies that Si-H bonds stabilize the defect states, resulting in a large light-induced degradation.