Preparation and Properties of High-Quality a-Si Films with a Super Chamber : Separated Ultra-High Vacuum Reaction Chamber-Reference-Cited by-同舟云学术

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Preparation and Properties of High-Quality a-Si Films with a Super Chamber : Separated Ultra-High Vacuum Reaction Chamber

Published:1987-01-20 Issue:Part 1, No. 1 Volume:26 Page:33-38
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Tsuda Shinya,Takahama Tsuyoshi,Isomura Masao,Tarui Hisaki,Nakashima Yukio,Hishikawa Yoshihiro,Nakamura Noboru,Matsuoka Tsugufumi,Nishiwaki Hidenori,Nakano Shoichi,Ohnishi Michitoshi,Kuwano Yukinori

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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