Chemical and physical characterization of C(N)-doped W–S sputtered films

Abstract

The load-bearing capacity of self-lubricating W–S films can be improved by doping with nitrogen or carbon. In this study, the chemical composition, the atomic bonding, the structure, and the surface and cross section morphologies of sputtered W–S–C(N) films were analyzed. The addition of the doping element leads to a progressive broadening of the x-ray diffraction (XRD) peaks indicating a loss of crystallinity. In W–S–N films, amorphous structure could be obtained. In W–S–C films, W–C compounds were detected in conjunction with the hexagonal WS2 phase. For the highest C contents, a nanocomposite structure, including those phases and graphite, was suggested for the film. X-ray photoelectron spectroscopy results showed different types of bonds in the W4f peak in good agreement with the XRD results, i.e., when W–C(N) compounds were indexed W–S, W–C, and W–N bonds are present in the W4f peak. For the highest C content film, the detection of C–C bond in the C1s peak confirmed the formation of graphite.