Thermo-Mechanical Ni50Ti50/Si Composite Thin Film Switch

Abstract

AbstractThe mechanical properties of Ni50Ti50 deposited on Si and 3C-SiC substrates were studied focussing on the interaction of the film and substrate. This interaction determines the transformation characteristics through interface accommodation and mechanical constraints exerted by the substrate stiffness. Substrate stiffness, controlled by the film/substrate thickness ratio, was found to have a substantial influence on the output energy of the film/substrate composite. A switch type composite based on this knowledge was fabricated and tested.