Glancing angle x-ray study of the effect of oxygen on interface reactions in Al/Ni bilayers

Abstract

Glancing angle x-ray reflectivity and EXAFS measurements have been made on a series of UHV prepared Al/Ni bilayers with varying amounts of oxygen impurities. These samples show an intrinsic reacted region prior to annealing, and for clean samples further reaction occurs at 250 °C. Oxygen is found to influence strongly the course of the reaction with an effect which depends on its location. A few percent O impurity within the Al film strongly suppresses the grain boundary diffusion path, which allows the growth of a smooth NiAl3 layer. Interfacial O exposures of 60 and 600 Langmuir both inhibit the initial reaction and raise the temperature at which further reaction occurs to as much as 300 °C with an effect which depends on exposure. The thickness of the intrinsic reaction zone is about 60 Å for clean samples, and is nearly eliminated for contaminated interfaces. The results indicate that surface/interface, grain boundary, and bulk diffusion all play important roles in the formation of these interfaces, and that each of these is influenced by O impurities.