Measurement of Micromechanical Properties Using Atomic Force Microscope with Capacitative-Reference-Cited by-同舟云学术

Measurement of Micromechanical Properties Using Atomic Force Microscope with Capacitative

Published:1989 Issue: Volume:153 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Neubauer Gabi,Cohen Sidney R.,McClelland Gary M.

Abstract

AbstractA new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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