Author:
Foltyn S. R.,Muenchausen R. E.,Estler R. C.,Peterson E.,Hutchinson W. B.,Ott K. C.,Nogar N. S.,Hubbard K. M.,Dye R. C.,Wu X. D.
Abstract
ABSTRACTTarget modification by excimer laser exposure has been investigated. Under conditions typical in the fabrication of superconducting thin films, deposition rate decreases with exposure and significant physical and chemical modifications occur on the target surface. These modifications do not inhibit congruent evaporation.
Publisher
Springer Science and Business Media LLC
Cited by
25 articles.
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