Measurement of Particle Densities and Sizes: Application to Silane/Argon Plasmas

Abstract

AbstractWe discuss new methods for measuring particle number densities, masses and size distributions by laser techniques.These methods do not require assumptions of particle optical properties or instrumental calibration by known particles.We summarize the theoretical basis of these techniques and discuss the light scattering fluctuation analysis, which can yield number density and size information.Experimental data for rf discharges of silane/argon mixtures are briefly presented to illustrate some of the theoretical predictions.