Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target

Abstract

ABSTRACTDiamond-like a-C:H films were obtained by reactive dc-magnetron sputtering from a glassy carbon target in an argon-hydrogen atmosphere. To our knowledge, this is the first time that glassy carbon is used as target material. The a-C:H films are transparent and hard. The a-C:H films can be used as protection and antireflection coatings on a-Si:H photoreceptors. The electrical, optical and structural properties of the a-C:H films are examined.