Growth and Characterization of Ferroelectric Pb(Zr,Ti)OM3 Thin Films by Mocvd Using A 6 Inch Single Wafer Cvd System

Abstract

AbstractFerroelectric Pb(Zr,Ti)O3(PZT) films with a perovskite phase were successfully grown by MOCVD using a 6 inch wafer CVD system. A two step growth process was proposed to obtain perovskite PZT films at high gas supplying ratios of [Zr]/([Zr]+[Ti]). The electrical properties of the PZT films obtained were measured. Large area growths of PZT films were carried out and the uniform films could be grown on the entire area of a 6 inch Si wafer. It was also found that the step coverage characteristic of the films grown by MOCVD was good.