Thin film technologies for manufacturing piezoelectric materials-Reference-Cited by-同舟云学术

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Thin film technologies for manufacturing piezoelectric materials

Published:2010 Issue: Volume: Page:441-492
ISSN:
Container-title:Advanced Piezoelectric Materials
language:
Short-container-title:

Author:

Wasa K.

Publisher

Elsevier

Link

http://woodhead.metapress.com/index/R423G34545603684.pdf

Reference82 articles.

1. The physics of ferroelectric memories;Auciello,1998

2. Sputtering by Particle Bombardment I,1981

3. Handbook of Deposition Technologies for Films and Coatings,1993

4. The effective electromechanical coupling coefficient of piezoelectric thin-film resonators;Chen;Appl. Phys. Lett.,2005

5. Ferroelectric ceramics: tailoring properties for specific applications;Cross,1993

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement;Microsystems & Nanoengineering;2023-03-06

2. Tactile Device Based on Piezoelectric MEMS by Using a Polymer/PZT Laminated Structure;IEEJ Transactions on Sensors and Micromachines;2017

3. Thin films for material engineering;Japanese Journal of Applied Physics;2016-06-09

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