Selective Surface Modification of a Fluorocarbon Resin Into Hydrophilic Material Using an Excimer Laser

Abstract

AbstractSelective surface modification of fluorocarbon resin has been demonstrated by using an ArF excimer laser beam and an ammonia complex which was made from NH3 and B2H6 gases. The fluorocarbon resin was set in the atmosphere of NH3 gas. NH3 molecules which were adsorbed on the surface reacted quickly with the B2H6 molecules, and an ammonia complex was produced. As a result, the complex was adsorbed on the surface. The resin surface was selectively irradiated by ArF laser beam. The complex and C-F bonds of this resin were excited by the laser beam, and the surface was selectively modified to be hydrophilic property. The modified samples were evaluated by XPS analysis, measuring the contact angles of the water and the SEM image on the surface.