Electron Energy Distribution Functions in RF Molecular Plasmas-Reference-Cited by-同舟云学术

Electron Energy Distribution Functions in RF Molecular Plasmas

Published:1986 Issue: Volume:68 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Dilonardo M.,Capitelli M.,Winkler R.,Wilhelm J.

Abstract

AbstractElectron energy distribution functions in molecular rf plasmas (CO, SF6) have been calculated by numerically solving the time dependent Boltzmann equation in a wide range of field frequencies up to the establishment of the periodic state.Particular attention is given to the reduction of the modulation degree and phase shift with respect to the rf field of the isotropic distribution function and of some macroscopic quantities as a function of frequency.Time averages of distribution functions and of some macroscopic quantities are then compared with the corresponding results obtained by using the effective field approximation.Finally we discuss the role of the second kind collisions in affecting the results.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference7 articles.

1. [4] Winkler R. , Capitelli M. , Dilonardo M. , Gorse C. and Wilhelm J. , Plasma Chem.Plasma Proc., in press.

2. Main Features of the Electron Kinetics in Collision Dominated Steady-State rf Plasmas

3. Electron Energy Distribution Functions of Hydrogen: The Effect of Superelastic Vibrational Collisions and of the Dissociation Process

4. Kinetic processes in non-equilibrium carbon monoxide discharges. II. Self-consistent electron energy distribution functions

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