3D trajectories and diffusion of single ceria particles near a glass surface and their removal

Author:

Seo JihoonORCID,Gowda Akshay,Khajornrungruang PanartORCID,Hamada Satomi,Babu S.V.

Abstract

AbstractWe extend our recent 2D trajectory (x–y plane) and diffusion coefficient data of ceria particles near a glass surface obtained at pH 3, 5, and 7 using evanescent wave microscopy and video imaging to 3D trajectories by analyzing the separation distance between the particles and the glass surface in the vertical z‐direction. Mean squared displacement (MSD3D) of ceria particles was calculated to quantify 3D trajectories. Three‐dimensional diffusion coefficients were obtained from the MSD3D curves and were compared with two‐dimensional diffusion coefficients. By analyzing the MSD curves, we found that ceria particles exhibited only confined motion at pH 3 and 5, while both confined and Brownian motion were showed at pH 7. We also evaluated the cleaning ability of DI water adjusted to pH 10 and 12 to remove ceria particles from glass surfaces and related the results to the calculated trajectory, diffusion coefficient, and interaction potential data.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Challenges and solutions for post-CMP cleaning at device and interconnect levels;Advances in Chemical Mechanical Planarization (CMP);2022

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