CaP/Si Heteroepitaxial Layers with Reduced Defect Density

Abstract

AbstractIt is shown that GaP layers grown upon Si at a single temperature of 900ºC can have a crystalline quality superior to that exhibited by previous two—step and one—step growth methods. The layers are characterized by a planar network of misfit dislocations confined to the interface plane an a reduced density of threading dislocations (low 106 cm-2; previously >108). Very few threading defects were observed in areas devoid of amorphous oxide contamination, as shown by HREM examination of cross—sectional samples. A low growth rate during nucleation enhances crystalline perfection, since it decreases the tendency toward three—dimensional islanding.