Characteristic Comparison Between Ge-on-Insulator (GOI) and SI-on-Insulator (SOI) Beam-Induced Crystallization Mechanism

Abstract

AbstractCharacteristics of beam-recrystallized Si-on-insulator (SOT) and Ge-on-insulator (GOI) material systems are compared for the first time to gain complementary understanding of the crystallization mechanism that would benefit both systems. In general, GOI has been found to behave quite differently from SOI. In SOI, Si yields sub-boundaries; in GOI, Ge generates twinned or faceted crystals. In GOI, too, sub-boundary-like features were observed, but only occasionally in the midst of twinned crystals. Also observed in GOI was the phenomenon of seeded crystallization breakdown, where defect-free crystals from the seed abruptly turn into defect-laced crystals at a certain distance from the seed. This phenomenon is highly characteristic in SOI, but has never been reported for GOI. These findings are compared and discussed in light of the traditional understanding of crystal growth.