Author:
Pfeiffer Loren,West K. W.,Paine Scott,Joy D. C.
Abstract
ABSTRACTWe review recent results of our Graphite Strip Heater Si-on-Insulator (SOI)
effort: (i) recrystallization of SOI films on 100 mm wafers, (ii) model of
subboundary pattern formation in SOI films, (iii) low defect density SOI
films by ultra slow scanning of the melt zone, (iv) low defect density SOI
films by patterned openings in the cap oxide overlayer.
Publisher
Springer Science and Business Media LLC
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