Author:
Stangl J.,Zerlauth S.,Schäffler F.,Bauer G.,Berti M.,Salvador D. De,Drigo A. V.,Romanato F.
Abstract
AbstractFrom the comparison of precise determinations of the Ge and C contents of a series of Si1-x-yGexCy epilayer samples (x < 0.18, y < 0.02) by Rutherford and resonant backscattering experiments and x-ray diffraction, the variation of the Si1-x-yGexCy lattice spacing as a function of C content is determined. A significant negative deviation from Vegard's rule is observed, in agreement with theoretical predictions by Kelires.
Publisher
Springer Science and Business Media LLC
Cited by
6 articles.
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