Author:
Marek T.,Heindl J.,Strunk H.P.,Eckstein R.,Müller St.G.,Hofmann D.
Abstract
AbstractRisers and treads on terraced surfaces of modified-Lely (M-Lely) grown 6H-SiC(0001) bulk crystals are investigated by reflection electron microscopy (REM). On risers we find parallel steps, with a height of one or two unit cells. On treads we find in addition to growth spirals island formation. We take these observations to conclude that two competitive processes operate in parallel, the step-flow mode and the two-dimensional nucleation.
Publisher
Springer Science and Business Media LLC