Explosive crystallization phenomena in SOI structures

Abstract

Using the double pulse technique with two synchronized lasers, we studied the conditions of ignition and evolution of explosive crystallization. The structure of the resulting crystallized layers is analyzed by TEM. Results of calculations are reported describing the development of the two phase fronts: amorphous/molten and molten/crystalline. It is shown that the system takes more than 500 ns to reach the steady state. The experimental results support the model of creating first a melt nucleus in the amorphous layer followed by the formation of the crystalline nucleus in the molten sphere. Competitive solid phase nucleation and growth in the amorphous layer limit the temperature-time interval of melt nucleation. Defined explosively crystallized areas in laterally structured SOI layers are presented.