Neodymium and Erbium Implanted Gan

Abstract

AbstractStrong rare earth (RE) emissions from Nd and Er implanted into MOCVD grown GaN were observed through photoluminescence (PL) with below bandgap excitation from an Ar+laser. Three well resolved manifolds of 4f lines from the crystal-field split 4F3/2 → 4I9/2, 4F3/2 → 4I11/2, and 4F3/2 → 4I13/2 transitions of Nd3+ were observed at low temperature at ˜0.98, ˜1.14, and ˜1.46 μm, respectively. The Er implanted GaN showed both the 4I13/2 → 4I15/2 Er3+ transition at ˜1.54 μm and the 4I11/2 → 4I15/2 Er3+ transition at ˜1.00 μm. The Er luminescence at ˜1.54 μm and Nd luminescence at ˜1.1 μm persisted to room temperature. Both Er and Nd implanted samples showed increasing RE3+ signal as annealing temperature increased from 700 to 1000 °C. The growth of new 4f crystal-field split-lines in the ˜1.54 μm 4I13/2 → 4I15/2 manifold as annealing temperature was increased to 1000 °C suggests multiple Er3+ radiative centers.