Structural and Ferroelectric Properties of SrBi2Ta2O9 Thin Films-Reference-Cited by-同舟云学术

Structural and Ferroelectric Properties of SrBi2Ta2O9 Thin Films

Published:1994 Issue: Volume:361 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Amanuma Kazushi,Hase Takashi,Mtyasaka Yoicht

Abstract

ABSTRACTStructural and electrical properties were investigated for chemically prepared SrBi2Ta2O9(SBT) thin films on Pt/Ti/SiO2/Si substrates. Good ferroelectric properties were obtained with a Pt top electrode: Pr=10.0μC/cm2 and Ec-34kV/cm. Au top electrodes resulted in smaller Pr. However, no fatigue was observed up to 109 switching cycles regardless of the top electrode material. Grains were spherical, not columnar, and the average grain size was 200nm. A marked structural change took place in the bottom Pt/Ti electrode during film preparation. The SIMS analysis indicates the reaction between Bi and Pt

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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