Author:
Amanuma Kazushi,Kunio Takemitsu,Cuchiaro Joe
Abstract
AbstractSrBi2Ta2O9(SBT) capacitors were integrated to the structure for a mega-bit nonvolatile memory, and their electrical properties after metallization were investigated. Annealing above 500°C after contact-etching was necessary to obtain good electrical properties. A well saturated hysteresis loop with 2Pr of more than 15μC/cm2 was obtained for the 0.7×0.7μm capacitor. The read-out polarization was very stable in 105 sec after the write-pulse. No fatigue or imprint was observed up to 1011 cycles. These results show suitability of SBT capacitors for a mega-bit non-volatile memory.
Publisher
Springer Science and Business Media LLC
Cited by
2 articles.
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