Author:
van der Donck Jacques,Bussink Peter,Fritz Erik,van der Walle Peter
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference30 articles.
1. G.E. Moore, Proc. IEEE 86, 1, 82-84, 1998 Reprinted from Gordon E. Moore, Electronics, 114–117, April 19, 1965.
2. G.E. Moore, reprinted from Technical Digest 1975. International Electron Devices Meeting, IEEE, 11-13 (1975).
3. ITRS 2013, Litho_2013 tables.
4. A. Yen, Presentation EUVL symposium, Washington, October 27th 2014.
5. C. Zoldesi, K. Bal, B. Blum, G. Bock, D. Brouns, F. Dhalluin, N. Dziomkina, J. Diego Arias Espinoza, J. de Hoogh, S. Houweling, M. Jansen, M. Kamali, A. Kempa, R. Kox, R. de Kruif, J. Lima, Y. Liu, H. Meijer, H. Meiling, I. van Mil, M. Reijnen, L. Scaccabarozzi, D. Smith, B. Verbrugge, L. de Winter, X. Xiong, J. Zimmerman, Proc. SPIE 9048, 90481N (2014).
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