Preparation and Chemical Investigation of Porous Silicon

Abstract

ABSTRACTWe have begun a systematic study of the chemistry of light emitting porous Si (LEPOS) using X-ray photoemission spectroscopy and time-of-flight elastic recoil nuclear scattering. The relation of chemical composition to preparation parameters and its evolution with rapid thermal annealing in N2:H2 and in vacuum were studied. The relation between chemical and photoluminescence properties and stability was investigated. The composition of LEPOS is extremely sensitive to preparation conditions and to subsequent treatment. The concentration of C and F in addition to Si, H and O vary with thermal treatment conditions and with time after preparation. However, preparation under the cleanest possible conditions increase both reproducibility and stability.