Study of Non-Aqueous Passivation on GaSb (100) Surfaces

Abstract

AbstractDue to the high chemical reactivity of GaSb surfaces, many commonly used aqueous sulfide passivation techniques lead to the growth of surface oxides that degrade device performance. We have developed a non-aqueous passivation regime consisting of Na2S/benzene/15-crown-5/oxidant. The use of a non-polar, aprotic organic medium required the addition of a specific chelating agent, i.e. a 15-crown-5 ether, to solubilize sodium sulfide, and organic oxidizing agents, such as anthraquinone and benzophenone, to act as electron acceptors. The surface optical and chemical properties of GaSb surfaces after aqueous and non-aqueous sulfide treatments were compared. Non-aqueous passivation resulted in higher PL intensity, lower oxide content, and a less amount of elemental Sb than aqueous passivation.