Author:
Lu J.P.,Schuylenbergh K. Van,Ho J.,Wang Y.,Boyce J. B.,Street R. A.
Abstract
AbstractThe technology of large area electronics has made significant progress in recent years because of the fast maturing excimer laser annealing process. The new thin film transistors based on laser processed poly silicon provide unprecedented performance over the traditional thin film transistors using amorphous silicon. They open up the possibility of building flat panel displays and imagers with higher integration and performance. In this paper, we will review the progress of poly-Si thin film transistor technology with emphasis on imager applications. We also discuss the challenges of future improvement of flat panel imagers based on this technology.
Publisher
Springer Science and Business Media LLC
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