Author:
Ramkumar K.,Lee J.,Safari A.,Danforth S.C.
Abstract
ABSTRACTThe deposition of thin films of ferroelectric materials by the laser ablation technique was investigated. The films were grown by ablation from a bulk target of lead zirconate titanate (PZT) exposed to laser pulses from CO2 amd KrF excimer lasers. The effects of deposition and annealing conditions on the structure and stoichiometry of the films were studied.
Publisher
Springer Science and Business Media LLC
Cited by
15 articles.
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