Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM

Abstract

ABSTRACTNovel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.