Abstract
ABSTRACTEpitaxial thin films of BaF2 were deposited for the first time onto (100) InP at a substrate temperature of around 450°C to 480°C by RF magnetron sputtering. The structural properties of the BaF2 film were a strong function of the substrate temperature during film deposition. X-ray diffraction analysis revealed a pure c-axis orientation perpendicular to the substrate surface. Scanning electron microscopy surface scan indicated a highly textured film with grid growth morphology. Ellipsometry measurement on the films gave a refractive index in the range of 1.4 to 1.6. The capacitance vs voltage analysis on a capacitor with a structure of Au/BaF3/InP demonstrated a dielectric constant of around 7.3 for the BaF2.
Publisher
Springer Science and Business Media LLC