Crystallization of Sol Gel Pzt on Aluminium and Platinum Metallizations-Reference-Cited by-同舟云学术

Crystallization of Sol Gel Pzt on Aluminium and Platinum Metallizations

Published:1991 Issue: Volume:243 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Barrow D.,Vasant Kumar C.V.R.,Pascual R.,Sayer M.

Abstract

AbstractSol gel prepared PZT films from 0.3 - 1.0 μm in thickness can be crystallised at temperatures down to 520°C on aluminium substrates, but such films are often non-ferroelectric. Comparison with films made on Pt substrates suggests that reduced oxygen content at the interface nucleates a cubic non-ferroelectric PZT phase.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference10 articles.

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3. 7. Kumar C.V.R Vasant , Pascual R. and Sayer M. , J. Appl. Phys. 1992 (in press).

4. 4. Johnson D.J. , Amm D.T. , Griswold E. , Sreenivas K. , Yi G. and Sayer M. , Mat. Res. Soc. Proc. Ferroelectric Thin Films, April 1990.

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