Research on vertical GaN devices based on gradient Al components

Author:

Chen Yonghe,Yang Ye,Zhai Jianghui,Sun Yuanyuan

Abstract

A groove-gate power device with a linearly gradient Al composition P-type AlGaN superjunction (abbreviated as LG-SJCAVET) is proposed, which uses polarized P-type AlGaN material instead of the traditional P-type GaN buried layer, avoiding the technical bottleneck of achieving high-aspect-ratio P-type doping in GaN materials. Simulation results show that, under the same structural parameters, the breakdown voltage of LG-SJCAVET reaches 2954V, and the on-resistance is 1.669 mΩcm2, which is due to no current flowing through the P-pillar, resulting in an increase in on-resistance, while affecting the DC characteristics of the device. The power figure of merit of the device is 5.27 GW/cm2, which is 67.11% and 27.38% higher than that of the traditional device and P-type GaN buried layer device, respectively. Therefore, the LG-SJCAVET device solves the problems of the high technical difficulty of the traditional P-type GaN buried layer process, difficulty in activating acceptor impurities, and poor thermal stability of the device, exhibiting superior breakdown voltage characteristics.

Funder

National Natural Science Foundation of China

Guangxi Provincial Key Laboratory of Precision Navigation Technology and Application, Guilin University of Technology

Guangxi Key Laboratory of Wireless Wideband Communication and Signal Processing, Guilin University of Electronic Technology

Publisher

Frontiers Media SA

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy,Mathematical Physics,Materials Science (miscellaneous),Biophysics

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