An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
Author:
Zhang Huan1ORCID, Chen Weiping12, Yin Liang12, Fu Qiang12
Affiliation:
1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China 2. Key Laboratory of Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China
Abstract
This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference35 articles.
1. Prikhodko, I.P., Nadig, S., Gregory, J., Clark, W.A., and Judy, M.W. (2017, January 28–30). Half-a-month stable 0.2 degree-per-hour mode-matched mems gyroscope. Proceedings of the 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kauai, HI, USA. 2. Zhu, J.X., Liu, X.M., Shi, Q.F., He, T.Y., Sun, Z.D., Guo, X.E., Liu, W.X., Sulaiman, O.B., Dong, B.W., and Lee, C.K. (2020). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. Micromachines, 11. 3. Frequency-Modulated MEMS Gyroscopes: A Review;Ren;IEEE Sens. J.,2021 4. Design and Development of the MEMS-Based High-g Acceleration Threshold Switch;Singh;J. Microelectromech. Syst.,2021 5. Design of a Dual Quantization Electromechanical Sigma–Delta Modulator MEMS Vibratory Wheel Gyroscope;Sheng;IEEE/ASME J. Microelectromech. Syst.,2018
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