1. Center for MicroElectromechanical Systems (CMEMS-UMinho), Campus de Azurém, University of Minho, 4800-058 Guimarães, Portugal
2. LABBELS—Associate Laboratory, 4800-058 Guimarães, Portugal
3. INESC TEC, 4200-465 Porto, Portugal
4. CEFT, Faculdade de Engenharia da Universidade do Porto (FEUP), Rua Roberto Frias, 4200-465 Porto, Portugal
5. MEtRICs, Mechanical Engineering Department, Campus de Azurém, University of Minho, 4800-058 Guimarães, Portugal