Nano-Precision Processing of NiP Coating by Magnetorheological Finishing
-
Published:2023-07-20
Issue:14
Volume:13
Page:2118
-
ISSN:2079-4991
-
Container-title:Nanomaterials
-
language:en
-
Short-container-title:Nanomaterials
Author:
Xu Chao1, Peng Xiaoqiang1, Hu Hao1, Liu Junfeng1, Li Huang1, Luo Tiancong2, Lai Tao1
Affiliation:
1. Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China 2. Beijing Zhenxing Institute of Metrology and Measurement, Beijing 100074, China
Abstract
NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.
Funder
National Key Research and Development Program of China National Natural Science Foundation of China
Subject
General Materials Science,General Chemical Engineering
Reference39 articles.
1. Risse, S., Gebhardt, A., Damm, C., Peschel, T., Stöckl, W., Feigl, T., Kirschstein, S., Eberhardt, R., Kaiser, N., and Tünnermanna, A. (2008, January 23–28). Novel TMA telescope based on ultra precise metal mirrors. Proceedings of the SPIE–Space Telescopes and Instrumentation 2008: Optical, Infrared, and Millimeter, Marseille, France. 2. Paolo, C., Vania, D.D., Paola, Z., Emanuele, P., Gianluca, M., Luca, T., Daniele, B., Emiliano, D., Matteo, L., and Fausto, C. (2019, January 11–15). The primary mirror of the ARIEL mission: Study of thermal, figuring and finishing treatments and optical characterization of Al 6061 samples mirrors. Proceedings of the SPIE–Astronomical Optics: Design, Manufacture, and Test of Space and Ground Systems II, San Diego, CA, USA. 3. Lin, Z., Hu, H., Dai, Y., Zhong, Y., and Xue, S. (2023). High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon. Nanomaterials, 13. 4. Highly efficient planarization of sliced 4H–SiC (0001) wafer by slurryless electrochemical mechanical polishing;Yang;Int. J. Mach. Tools Manuf.,2019 5. Dominant factors and their action mechanisms on material removal rate in electrochemical mechanical polishing of 4H-SiC (0001) surface;Yang;Appl. Surf. Sci.,2021
|
|