MEMS Fluxgate Sensor Based on Liquid Casting-Reference-Cited by-同舟云学术

MEMS Fluxgate Sensor Based on Liquid Casting

Published:2023-11-26 Issue:12 Volume:14 Page:2159
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Yang Ying¹²,Xu Wei¹³,Chen Guangyuan¹^ORCID,Jin Zhenhu¹,Wang Dandan⁴,Mai Zhihong⁴,Xing Guozhong²⁵,Chen Jiamin¹²³^ORCID

Affiliation:

1. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

3. School of Microelectronics, University of Science and Technology of China, Hefei 230026, China

4. Jiufengshan Laboratory, Wuhan 430206, China

5. State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100049, China

Abstract

Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this reason, a MEMS fluxgate sensor based on liquid casting with a closed-loop Fe-based amorphous alloy core is proposed. Based on the process parameters of liquid casting, the structure of the MEMS fluxgate sensor was designed. Utilizing MagNet to build the simulation model, the optimal excitation conditions and sensitivity were obtained. According to the simulation model, a highly sensitive MEMS fluxgate sensor based on liquid casting was fabricated. The resulting sensor exhibits a sensitivity of 2847 V/T, a noise of 306 pT/√Hz@1 Hz, a bandwidth of DC-10.5 kHz, and a power consumption of 43.9 mW, which shows high sensitivity and low power consumption compared with other MEMS fluxgates in similar size.

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

https://www.mdpi.com/2072-666X/14/12/2159/pdf

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